Metallurgical Measuring Microscope INSPECT400
Usage:
INSPECT series measuring metallurgical microscope are widely used in semiconductor packages, solder pads, loop height, FPD panels (LCM), wafer level CSPS and so on.
Features:
High-precision marble base, table and column to ensure high stability and rigidity
Marble table design, with precision V-shaped cross rail, ensure long-term use without deform, effectively guarantee high mechanical precision
High-quality optical system and high-resolution CCD ensure sharp image edges
Three-ring and eight-zone LED ring surface cold light source and contour light source, avoid the deformation of precision parts caused by the heat from light
Optional Nikon tilting trinocular tube + quintuple nosepiece
Independent research and development of image measuring software, powerful and easy to operate
Technical data:
Model |
INSPECT300 |
INSPECT400 |
INSPECT500 |
X,Y axis travel(mm) |
300*200 |
400*300 |
500*400 |
Stage glass size(mm) |
357*257 |
457*357 |
557*457 |
Z axis travel(mm) |
100 |
X,Y,Z axis resolution (μm) |
1 |
Length unit |
Linear scale |
Measuring accuracy (μm) |
2.5+L/150 L=measuring length (mm) |
Operation mode(X, Y) |
Manual |
Operation mode(Z) |
CNC |
Camera |
High resolution CCD camera |
Quintuple nosepiece |
5X |
10X |
20X |
50X |
Eyepiece |
WF10X |
Measuring software |
2D measuring software |
Illumination |
Transmitted |
Epi-illumination system |
Contour |
LED parallel contour light |
Power supply |
AC100~240V 50/60Hz |
Infinity plan achromatic bright field objective
PL L5X/0.12 (Work distance):26.1 mm
PL L10X/0.25 (Work distance):20.2 mm
PL L20X/0.40 (Work distance):8.80 mm
PL L50X/0.70 (Work distance):3.68 mm
6V30W halogen and brightness enable control( Reflected
light)