| Customization: | Available |
|---|---|
| After-sales Service: | 18 Months Warranty |
| Warranty: | 18 Months Warranty |
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| Model | MR100 | |
| Measuring range | X axis | 100~220mm |
| Z axis | 320~620mm | |
| Z1 axis | ±420μm/65536:1 | |
| Roughness accuracy | Linear | ±(7nm+3.5%)μm |
| Repeatability | 1δ≤2nm | |
| Cutoff wavelength | 0.025,0.08,0.25,0.8,2.5,8mm | |
| Evaluation length | λcX2,3,4,5,6,7 | |
| Driving speed | X axis: 0.1-10mm/s | |
| Z axis: 0.5-10mm/s | ||
| Roughness paramters | Ra,Rp,Rv,Rz,Rz(jis),R3z,RzDIN,Rzj,Rmax,Rc,Rt,Rq,Rsk,Rku,Rsm,Rs,R△q,Rk,Rpk,Rvk,Mr1,Mr2,Rmr | |
| Waviness paramter | Wa,Wt,Wp,Wv,Wz,Wq,Wsm,Wsk,Wku,Wmr | |
| Profile paramter | Pa,Pt,Pp,Pv,Pz,Pq,Psm,Psk,Pku,Pmr | |
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