| Customization: | Available |
|---|---|
| After-sales Service: | 18 Months Warranty |
| Warranty: | 18 Months Warranty |
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| Model | MPR100 | |
| Measuring range | X axis | 100~220mm |
| Z axis | 320~620mm | |
| Z1 axis | C:0~±30mm/R:±420μm | |
| Profile accuracy | Z1 linear | ±(1.5+|0.2H|)μm |
| Arc | ±(2+R/8)μm | |
| Angle | ±2′ | |
| Straightness | 0.8μm/100mm | |
| Roughness accuracy | Linear | ±(7nm+3.5%)μm |
| Residual noise | ≤0.025μm | |
| Repeatability | 1δ≤2nm | |
| Cutoff wavelength | 0.025,0.08,0.25,0.8,2.5,8mm | |
| Evaluation length | λcX2,3,4,5,6,7 | |
| Driving speed | X axis: 0.1-10mm/s | |
| Z axis: 0.5-10mm/s | ||
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